ABL1000 Air Bearing Linear StageAerotech Inc.
The ABL 1000 series stages are the highest performance miniature air-bearing stages available. Aerotech has combined over 30 years of precision motion control and positioning system experience with the latest technologies to produce a truly outstanding miniature, linear air-bearing stage.ABL1000.pdf
ABL1500 Air Bearing Linear StageAerotech Inc.
The ABL1500, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics was designed specifically to meet those demands.ABL1500.pdf
ABL2000 Air Bearing Linear StageAerotech Inc.
The ABL 2000 combines excellent pitch/yaw characteristics with unsurpassed velocity control that is necessary for wafer imaging, defect detection and coating applicationsABL2000.pdf
ABL3600 Air Bearing Linear StageAerotech Inc.
The ABL3600 dual-axis, large aperture, open-frame, airbearing stage addresses the unique needs of scanning microscopy and mask and wafer inspection.ABL3600.pdf
ABL8000 Air Bearing Linear StageAerotech Inc.
The ABL8000 incorporates a modified cross section design that dramatically increases stiffness and stability. This is useful for large payloads whose C.G.'s are off of the carriage centerline. ABL8000.pdf
ABL9000 Air Bearing Linear StageAerotech Inc.
The ABL9000 is simply the world's highest performance air bearing. Designed to meet the exacting requirements of wafer, flat panel display, and optical inspection and fabrication, the ABL9000 sets new standards of performance. ABL9000.pdf
AHL9000 Air Bearing Linear StageAerotech Inc.
The AHL9000 linear motor stage combines air bearings for the scan axis and mechanical bearings for the step axis, and has been designed for demanding applications that require excellent step and scan performance.AHL9000.pdf
ABG10000 Air Bearing GantryAerotech Inc.
The ABG10000 Air Bearing Gantry puts Aerotech's core technologies and extensive manufacturing capability to work for you, providing outstanding performance and versatility in a wide range of automation applications.ABG10000.pdf
PlanarHD Air Bearing StageAerotech Inc.
The PlanarHD air-bearing stage has been designed specifically to maximize throughput by providing up to 2 m/s scan velocity and 5 g acceleration.PlanarHD.pdf
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